Module Identifier | PH33710 | |||||||||||
Module Title | SCIENCE OF SEMICONDUCTOR APPLICATIONS | |||||||||||
Academic Year | 2004/2005 | |||||||||||
Co-ordinator | Dr Andrew Evans | |||||||||||
Semester | Semester 2 | |||||||||||
Other staff | Professor Keith Birkinshaw, Dr Tudor E Jenkins | |||||||||||
Pre-Requisite | PH24510 , PH33610 | |||||||||||
Course delivery | Lecture | 22 lectures | ||||||||||
Seminars / Tutorials | Example classes and tutorials | |||||||||||
Assessment |
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There will be an optional integrated circuit design experiment in the third year advanced laboratory class to reinforce (4) above and give a literacy in computer aided design (CAD) tools.
Physics and chemistry of bulk semiconductor growth. Epitaxial growth of thin films.
Wafer processing:
oxidation, insulating films; lithography (optical, x-ray, electron-beam, ion-beam); etching (wet chemical, plasma, reactive ion); dopant diffusion, ion implantation; metallisation.
Physics of electron, ion and photon interaction with matter.
Bulk and thin film characterisation techniques:
electrical (conductivity, mobility), optical (reflectance, luminescence), compositional (spectroscopy, microscopy), structural (diffraction, scanned probe).
Statistical process control, quality control analysis:
Device electrical testing, VLSI testing.
Circuits: digital circuits, linear circuits, U and VLSI, gate arrays, ASICS.
Circuit design, VLSI design.
Device/circuit computer simulation.
This module is at CQFW Level 6