Module Identifier | PH33710 | ||||||||||||||
Module Title | SCIENCE OF SEMICONDUCTOR APPLICATIONS | ||||||||||||||
Academic Year | 2006/2007 | ||||||||||||||
Co-ordinator | Professor Andrew Evans | ||||||||||||||
Semester | Semester 2 | ||||||||||||||
Other staff | Dr Tudor E Jenkins, Professor Keith Birkinshaw | ||||||||||||||
Pre-Requisite | PH33610 , PH24510 | ||||||||||||||
Course delivery | Lecture | 22 lectures | |||||||||||||
Seminars / Tutorials | Example classes and tutorials | ||||||||||||||
Assessment |
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There will be an optional integrated circuit design experiment in the third year advanced laboratory class to reinforce (4) above and give a literacy in computer aided design (CAD) tools.
Physics and chemistry of bulk semiconductor growth. Epitaxial growth of thin films.
Wafer processing:
oxidation, insulating films; lithography (optical, x-ray, electron-beam, ion-beam); etching (wet chemical, plasma, reactive ion); dopant diffusion, ion implantation; metallisation.
Physics of electron, ion and photon interaction with matter.
Bulk and thin film characterisation techniques:
electrical (conductivity, mobility), optical (reflectance, luminescence), compositional (spectroscopy, microscopy), structural (diffraction, scanned probe).
Statistical process control, quality control analysis:
Device electrical testing, VLSI testing.
Circuits: digital circuits, linear circuits, U and VLSI, gate arrays, ASICS.
Circuit design, VLSI design.
Device/circuit computer simulation.
This module is at CQFW Level 6