Module Information
Module Identifier
PH33710
Module Title
SCIENCE OF SEMICONDUCTOR APPLICATIONS
Academic Year
2008/2009
Co-ordinator
Semester
Semester 2
Pre-Requisite
PH33610
Pre-Requisite
PH24510
Other Staff
Course Delivery
Delivery Type | Delivery length / details |
---|---|
Lecture | 22 lectures |
Seminars / Tutorials | Example classes and tutorials |
Assessment
Assessment Type | Assessment length / details | Proportion |
---|---|---|
Semester Assessment | Essay written during the Semester | 80% |
Semester Assessment | Continuous Assessment: test | 20% |
Supplementary Exam | 2 Hours Supplementary exam | 100% |
Learning Outcomes
After taking this module students should be able to:
- describe the complete route from the production of semiconductor substates and thin film structures to the production of packaged electronic devices
- critically analyse the technical issues involved (size, cost, power consumption etc.) in the production of an integrated device.
- design a simple digital circuit and layout the design using CAD tools.
Brief description
In combination with Semiconductor Physics, the Semiconductor Applications module will not only provide students with an understanding of the physics underlying semiconductor devices and applications but also introduce them to the processing of semiconductors to produce devices.
1) wafer production - single crystal
2) wafer processing - lithography
3) characterisation
4) device preparation
5) the VLSI design process
There will be an optional integrated circuit design experiment in the third year advanced laboratory class to reinforce (4) above and give a literacy in computer aided design (CAD) tools.
1) wafer production - single crystal
2) wafer processing - lithography
3) characterisation
4) device preparation
5) the VLSI design process
There will be an optional integrated circuit design experiment in the third year advanced laboratory class to reinforce (4) above and give a literacy in computer aided design (CAD) tools.
Content
Introduction to science of semiconductors and microelectronic technology.
Physics and chemistry of bulk semiconductor growth. Epitaxial growth of thin films.
Wafer processing:
oxidation, insulating films; lithography (optical, x-ray, electron-beam, ion-beam); etching (wet chemical, plasma, reactive ion); dopant diffusion, ion implantation; metallisation.
Physics of electron, ion and photon interaction with matter.
Bulk and thin film characterisation techniques:
electrical (conductivity, mobility), optical (reflectance, luminescence), compositional (spectroscopy, microscopy), structural (diffraction, scanned probe).
Statistical process control, quality control analysis:
Device electrical testing, VLSI testing.
Circuits: digital circuits, linear circuits, U and VLSI, gate arrays, ASICS.
Circuit design, VLSI design.
Device/circuit computer simulation.
Physics and chemistry of bulk semiconductor growth. Epitaxial growth of thin films.
Wafer processing:
oxidation, insulating films; lithography (optical, x-ray, electron-beam, ion-beam); etching (wet chemical, plasma, reactive ion); dopant diffusion, ion implantation; metallisation.
Physics of electron, ion and photon interaction with matter.
Bulk and thin film characterisation techniques:
electrical (conductivity, mobility), optical (reflectance, luminescence), compositional (spectroscopy, microscopy), structural (diffraction, scanned probe).
Statistical process control, quality control analysis:
Device electrical testing, VLSI testing.
Circuits: digital circuits, linear circuits, U and VLSI, gate arrays, ASICS.
Circuit design, VLSI design.
Device/circuit computer simulation.
Reading List
DV Morgan and K Board An Introduction to Semiconductor Microtechnology J Wiley Primo search I Brodie and JJ Murray Physics of Microfabrication Plenum Primo search M Jaros Physics and Applications of Semiconductor Microstructures Oxford Primo search N Weste and K Eshraghian Principles of CMOS design Primo search
Notes
This module is at CQFW Level 6