|Module Title||SCIENCE OF SEMICONDUCTOR APPLICATIONS|
|Co-ordinator||Dr Andrew Evans|
|Other staff||Dr Tudor Jenkins, Dr Keith Birkinshaw|
|Pre-Requisite||PH24510 , PH33610|
|Course delivery||Lecture||22 lectures|
|Seminars / Tutorials||Example classes and tutorials|
|Assessment||Exam||End of Semester Examination End of Semester Examination||80%|
|Continuous assessment||Test Test||20%|
In combination with Semiconductor Physics, the Semiconductor Applications module will not only provide students with an understanding of the physics underlying semiconductor devices and applications but also introduce them to the processing of semiconductors to produce devices.
1) wafer production - single crystal
2) wafer processing - lithography
4) device preparation
5) the VLSI design process
There will be an optional integrated circuit design experiment in the third year advanced laboratory class to reinforce (4) above and give a literacy in computer aided design (CAD) tools.
After taking this module students should be able to:
Additional learning activities
Visits to other academic/industrial centres within Wales and the UK to view facilities for design, production and testing of semiconductor devices.
Introduction to science of semiconductors and microelectronic technology.
Physics and chemistry of bulk semiconductor growth. Epitaxial growth of thin films.
oxidation, insulating films; lithography (optical, x-ray, electron-beam, ion-beam); etching (wet chemical, plasma, reactive ion); dopant diffusion, ion implantation; metallisation.
Physics of electron, ion and photon interaction with matter.
Bulk and thin film characterisation techniques:
electrical (conductivity, mobility), optical (reflectance, luminescence), compositional (spectroscopy, microscopy), structural (diffraction, scanned probe).
Statistical process control, quality control analysis:
Device electrical testing, VLSI testing.
Circuits: digital circuits, linear circuits, U and VLSI, gate arrays, ASICS.
Circuit design, VLSI design.
Device/circuit computer simulation.
DV Morgan and K Board. An Introduction to Semiconductor Microtechnology. J Wiley
I Brodie and JJ Murray. Physics of Microfabrication. Plenum
M Jaros. Physics and Applications of Semiconductor Microstructures. Oxford
N Weste and K Eshraghian. Principles of CMOS design.