|Module Title||SCIENCE OF SEMICONDUCTOR APPLICATIONS|
|Co-ordinator||Professor Andrew Evans|
|Other staff||Dr Tudor E Jenkins, Professor Keith Birkinshaw|
|Pre-Requisite||PH33610 , PH24510|
|Course delivery||Lecture||22 lectures|
|Seminars / Tutorials||Example classes and tutorials|
There will be an optional integrated circuit design experiment in the third year advanced laboratory class to reinforce (4) above and give a literacy in computer aided design (CAD) tools.
Physics and chemistry of bulk semiconductor growth. Epitaxial growth of thin films.
oxidation, insulating films; lithography (optical, x-ray, electron-beam, ion-beam); etching (wet chemical, plasma, reactive ion); dopant diffusion, ion implantation; metallisation.
Physics of electron, ion and photon interaction with matter.
Bulk and thin film characterisation techniques:
electrical (conductivity, mobility), optical (reflectance, luminescence), compositional (spectroscopy, microscopy), structural (diffraction, scanned probe).
Statistical process control, quality control analysis:
Device electrical testing, VLSI testing.
Circuits: digital circuits, linear circuits, U and VLSI, gate arrays, ASICS.
Circuit design, VLSI design.
Device/circuit computer simulation.
This module is at CQFW Level 6