|| PH33710 |
|| SCIENCE OF SEMICONDUCTOR APPLICATIONS |
|| 2007/2008 |
|| Professor Andrew Evans |
|| Semester 2 |
|| Dr Tudor E Jenkins, Professor Keith Birkinshaw |
|| PH33610 , PH24510 |
| Course delivery
|| Lecture || 22 lectures |
|| Seminars / Tutorials || Example classes and tutorials |
|Assessment Type||Assessment Length/Details||Proportion|
|Semester Assessment|| Essay written during the Semester ||80%|
|Semester Assessment|| Continuous Assessment: test ||20%|
|Supplementary Exam||2 Hours Supplementary exam ||100%|
After taking this module students should be able to:
describe the complete route from the production of semiconductor substates and thin film structures to the production of packaged electronic devices
critically analyse the technical issues involved (size, cost, power consumption etc.) in the production of an integrated device.
design a simple digital circuit and layout the design using CAD tools.
In combination with Semiconductor Physics, the Semiconductor Applications module will not only provide students with an understanding of the physics underlying semiconductor devices and applications but also introduce them to the processing of semiconductors to produce devices.
1) wafer production - single crystal
2) wafer processing - lithography
4) device preparation
5) the VLSI design process
There will be an optional integrated circuit design experiment in the third year advanced laboratory class to reinforce (4) above and give a literacy in computer aided design (CAD) tools.
Introduction to science of semiconductors and microelectronic technology.
Physics and chemistry of bulk semiconductor growth. Epitaxial growth of thin films.
oxidation, insulating films; lithography (optical, x-ray, electron-beam, ion-beam); etching (wet chemical, plasma, reactive ion); dopant diffusion, ion implantation; metallisation.
Physics of electron, ion and photon interaction with matter.
Bulk and thin film characterisation techniques:
electrical (conductivity, mobility), optical (reflectance, luminescence), compositional (spectroscopy, microscopy), structural (diffraction, scanned probe).
Statistical process control, quality control analysis:
Device electrical testing, VLSI testing.
Circuits: digital circuits, linear circuits, U and VLSI, gate arrays, ASICS.
Circuit design, VLSI design.
Device/circuit computer simulation.
DV Morgan and K Board An Introduction to Semiconductor Microtechnology
I Brodie and JJ Murray Physics of Microfabrication
M Jaros Physics and Applications of Semiconductor Microstructures
N Weste and K Eshraghian Principles of CMOS design
This module is at CQFW Level 6